Yang's Group

Fabrication Facilities

• ALD system
• Multi pocket e-beam/thermal deposition system
• Multi-target sputter deposition system
• FIB System [CICFAR]
• 2 PLD systems, 1 PLD/ MBE
• Ion milling/PVD system
• Rapid thermal annealing [COE]
• Silicon processing: 8 Inch Fab (400 sq.m Clean room)[SNDL]

Imaging and Lithography Facilities

• FIB System [CICFAR]
• Electron beam lithography [ISML]
• Scanning Electron microscope (SEM) [ISML]
• AFM/MFM
• Optical microscope
• Sub-nm (0.4nm) Helium ion microscope for imaging and lithography

Spectrometry

• MeV Van De Graff for Rutherford backscattering and channeling analysis
• MeV Pelletron for RBS/Channeling and variable temperature channeling system
• Synchrotron radiation covering spectroscopy from XRay to IR [SSLS]
• XRD (State of the art Brucker system with 2D detector for pole plot)
• UV-Vis Spectrophotometer
• UV-IR Photoluminescence System [COE]
• Solar Cell Simulator/ Evaluator
• Fs/Ps Laser spectroscopy Labs for pump-probe measurements

Characterization Facilities

• 2 Dilution refrigerators
• 2 He4 variable temperature transport measurement systems
• MPMS system (SQUID)
• PPMS
• Multi pin probe station (pogo)
• High frequency characterization probe station (50 GHz)

National University of Singapore
Department of Electrical and Computer Engineering

Faculty of Engineering